Synthetic production equipment-何军课题组

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Synthetic production equipment

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CVD special high temperature furnace A
CVD special high temperature furnace B
CVD special high temperature furnace C
KMT-64RL Atomic Layer Deposition System
SHL-100-RIE plasma etching machine
Glove box
Fume hood
Transfer console
UV lithography machine

Address: School of Physics Science and Technology, Wuhan University, Wuchang District, Wuhan City, Hubei Province　 Email: He-jun@whu.edu.cn

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